关键词:
DM CGAA
JL
IM
SiNW
NEGF
I-D
COMPACT EXPLICIT MODEL
PART I
DESIGN
TRANSISTOR
STACK
DIELECTRICS
IMPACT
SPACER
FINFET
FET
摘要:
Present work investigates the DC and Analog/RF characteristics such as the drain current (I-D), Transconductance (g(m)), Transconductance Generation Factor (TGF), Cut-off frequency (f(T)), Frequency Transconductance Product (FTP), Transit time (tau), and the total resistance of the source region, drain region, and channel resistance (RSD+CH) for Dual Metal (DM) Inversion Mode (IM) and Junctionless (JL) Cylindrical Gate All Around (CGAA) Silicon nanowire (SiNW) MOSFETs with 5 nm gate length using Silvaco ATLAS 3D TCAD. In this work, the Non-Equilibrium Green's Function approach along with the self-consistent solution of Schrodinger's equation and Poisson's equation has been considered. The channel is taken to be lightly doped in the case of IM DM CGAA SiNW type of device. The effect of DM Gate work function engineering for SiNW channel of diameter 3 nm with gate oxide (SiO2) the thickness of 0.8 nm on I-D,g(m), TGF, f(T), tau, FTP and R-CH has been studied. Moreover, a comparative study has been made between IMDM and JLDM CGAA SiNW devices with the above-mentioned parameters. For the JL device, the optimization of doping concentration is performed to get the same (i) I-ON current and (ii) threshold voltage (V-TH) as the IM device. About 3.09 times and 21.89 times reduction in I-OFF is seen for the same I-ON and V-TH optimized devices respectively as compared to IM device. It has been found that DM Gate variation minimizes drain-induced barrier lowering (DIBL) in IM and JL devices. The JL SiNW showed much lower DIBL similar to 16.46 mV/V, a near ideal SS similar to 60 mV/dec, and higher I-ON/I-OFF current ratio similar to 7.04 x 10(8) which is much better as compared to those reported in the literature for cylindrical gate all around (CGAA) devices. Also, it is found that the JL SiNW device performs better than IM in terms of SS, DIBL, I-ON/I-OFF, g(m), TGF, f(T), tau, FTP and RSD+CH.